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Extra info for Advances in Electronic and Electrochemical Ceramics, Volume 179
12 Ungyu, Paik, Vincent A. Hackley, Sung-Churl Choi, and Yeon-Gil Jung, "The Effect of Electrostatic Repulsive Forces on the Stability of BaTiC>3 Particles Suspended in Non-aqueous Media," Colloids and Surfaces A: Physicochemical and Engineering Aspects, 135,77-88 (1998). I3 N. Yoshimura, M. Nishida, S. Noto, "Electrical Breakdown of Alumina Filled Epoxy Resin," Proceedings of the 14,h Symposium on Electrical Insulating Materials, October 5-7, 89-92(1981). 26 Advances in Electronic and Electrochemical Ceramics Advances in Electronic and Electrochemical Ceramics Edited by Fatih Dogan and Prashant Kumta Copyright © 2006.
The dissipation factor is more temperature sensitive and demonstrates temperature deviations above 200°C. The temperature effects are reversible and films regain their as-deposited properties when returned to room temperature. 85eV. The activation energy is independent of the applied electric field. m have been obtained. Increased DC power during deposition decreases the breakdown strength due to increased metal incorporation or voids in the sputtered films. Energy densities of up to 15 J/cc have been obtained on AlON films.
EXPERIMENTAL Amorphous aluminum nitride films were deposited using pulsed DC magnetron sputtering. The chamber was pumped to a base pressure less than 5x10 Torr before deposition. DC power was varied from 500 - 2000 W with pulse frequencies from 25 - 250 kHz. 999% pure aluminum sputter targets. Gas pressures ranged from 3 mTorr to 20 mTorr. Deposition conditions strongly influence the crystallinity of the films12, but optical and secondary electron microscopy observation confirmed our films were amorphous under all deposition conditions examined.